Wafer Level Zernike Polynomials
wlzpoly is a Python package that decomposes N-point wafer thickness measurements into M Zernike polynomial coefficients using LSQ or Ridge regression with LOOCV-tuned regularization. It ships with a reproducible three-stage demo (synthetic data, coefficient fitting, ground-truth verification), per-stage CLI, and a clean pure-Python API for semiconductor wafer-level process metrology.
